JPS6169895U - - Google Patents
Info
- Publication number
- JPS6169895U JPS6169895U JP15344884U JP15344884U JPS6169895U JP S6169895 U JPS6169895 U JP S6169895U JP 15344884 U JP15344884 U JP 15344884U JP 15344884 U JP15344884 U JP 15344884U JP S6169895 U JPS6169895 U JP S6169895U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor devices
- inclined chute
- tube
- process tube
- recovery device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 3
- 238000011084 recovery Methods 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Branching, Merging, And Special Transfer Between Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15344884U JPS6169895U (en]) | 1984-10-11 | 1984-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15344884U JPS6169895U (en]) | 1984-10-11 | 1984-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6169895U true JPS6169895U (en]) | 1986-05-13 |
Family
ID=30711467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15344884U Pending JPS6169895U (en]) | 1984-10-11 | 1984-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6169895U (en]) |
-
1984
- 1984-10-11 JP JP15344884U patent/JPS6169895U/ja active Pending
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